Interface roughness statistics of thin films from angle-resolved light scattering at three wavelengths

Optical Engineering

Volumn 37, Issue 2, 1998, Pages 696-704

  Rönnow, Daniel ^a,b  

^a UPPSALA UNIVERSITY   (Sweden)

^b MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

Author keywords

Angle resolved scattering; Interface roughness statistics; Light scattering; Thin films

Indexed keywords

EID: 0038613397     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601870     Document Type: Article

References (40)

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