Determination of interface roughness cross correlation of thin films from spectroscopic light scattering measurements

Journal of Applied Physics

Volumn 81, Issue 8, 1997, Pages 3627-3636

  Ronnow D ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342619549     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365481     Document Type: Article

References (45)

1. W. M. Tong and R. S. Williams, Annu. Rev. Phys. Chem. 45, 401, (1994).
2. A.-L. Barabási and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, 1995).
3. H.-N. Yang, G.-C. Wang, and T.-M. Lu, Diffraction from Rough Surfaces and Dynamic Growth Fronts (World Scientific, Singapore, 1993).
4. A. Duparré and H.-G. Walther, Appl. Opt. 27, 1393 (1988).
5. J. M. Bennett and J. H. Dancy, Appl. Opt. 20, 1785 (1981).
6. G. Binnig, C. F. Quate, and C. Gerber, Phys. Rev. Lett. 56, 930 (1986).
7. D. E. Barrick, in Radar Cross Section Handbook, edited by G. T. Ruck (Plenum, New York, 1970), Vol. 2, Chap. 9, pp. 671-772.
8. H. E. Bennett and J. O. Porteus, J. Opt. Soc. Am. 51, 123 (1961).
9. J. M. Elson, Phys. Rev. B 30, 5460 (1984).
10. T. Saldit, T. H. Metzger, J. Peisl, B. Reinker, M. Moske, and K. Samwer, Europhys. Lett. 32, 331 (1995).
11. E. Kröger and E. Kretschmann, Z. Phys. 237, 1 (1970).
12. P. Bousquet, F. Flory, and P. Roche, J. Opt. Soc. Am. 71, 1115 (1981).
13. J. M. Elson, Proc. Soc. Photo-Opt. Instrum. Eng. 240, 296 (1980).
14. D. G. Steams, J. Appl. Phys. 71, 4286, (1992).
15. V. Holy and T. Baumbach, Phys. Rev. B 49, 10668 (1994).
16. M. Kopecky, J. Appl. Phys. 77, 2380 (1995).
17. J. M. Eastman, Ph.D. thesis, University of Rochester, 1974.
18. J. Ebert, H. Pannhorst, H. Küster, and H. Welling, Appl. Opt. 18, 818 (1979)
19. A. Roos, M. Bergkvist, and C.-G. Ribbing, Appl. Opt. 28, 1360 (1989).
20. M. Bergkvist, A. Roos, C.-G. Ribbing, J. M. Bennett, and L. Mattsson, Appl. Opt. 28, 3902 (1989).
21. M. J. Elson, Theory and Software for Light Scattering from Multilayer Optical Components with Interfacial Roughness, Naval Air Warfare Center, Weapons Division, China Lake, CA, Technical Publication 8084, 1992.
22. J M. Elson, J. P. Rahn, and J. M. Bennett, Appl. Opt. 19, 669 (1980).
23. J. M. Elson, J. P. Rahn, and J. M. Bennett, Appl. Opt. 22, 3207 (1983).
24. A. Duparré, R. Dohle, and H. Müller, J. Mod. Opt. 37, 1383 (1990).
25. E. L. Church, P. Z. Takacs, and T. A. Leonhard, Proc. Soc. Photo-Opt. Instrum. Eng. 1165, 136 (1989).
26. G. Palasantzas, Phys. Rev. B 48, 14472 (1993).
27. O. S. Heavens, Optical Properties of Thin Solid Films (Dover, New York, 1965).
28. D. Rönnow and E. Veszelei, Rev. Sci. Instrum. 65, 327 (1994).
29. C. Amra, J. H. Apfel, and E. Pelletier, Appl. Opt. 31, 3134 (1992).
30. A. G. Spencer, M. Georgson, C. A. Bishop, E. Stenberg, and R. P. Howson, Sol. Energy Mater. 18, 87 (1988).
31. K. E. Andersson, M. Veszelei, and A. Roos, Sol. Energy Mater. Sol. Cells 32, 199 (1994).
32. B. P. Kozyrev and O. E. Vershinin, Opt. Spectrosc. VI, 345 (1959).
33. J. T. Neu, Proc. Soc. Photo-Opt. Instrum. Eng. 1995, 101 (1993).
34. J. C. Manifacier, J. Gasiot, and J. P. Fillard, J. Phys. E 9, 1002 (1976).
35. J. N. Hodgson, Optical Absorption and Dispersion in Solids (Chapman and Hall, London, 1970), Chap. 1, pp. 13-19.
36. D. Y. Smith, in Handbook of Optical Constants of Solids, edited by D. Palik (Academic, Orlando, 1985), Vol. 1, pp. 369-406.
37. C. Amra, J. Opt. Soc. Am. A 11, 197 (1994).
38. J. M. Bennett, J. Jahanmir, J. C. Podlesny, T. L. Balter, and D. T. Hobbs, Appl. Opt. 34, 213 (1995).
39. K. L. Westra, A. W. Mitchell, and D. J. Thomson, J. Appl. Phys. 74, 3608 (1993).
40. O. Kienzle, J. Staub, and T. Tschudi, Meas. Sci. Technol. 5, 747 (1994).
41. D. Rönnow, Proc. Soc. Photo-Opt. Instrum. Eng. 1995, 143 (1993).
42. D. Rönnow and A. Roos, Rev. Sci. Instrum. 66, 2411 (1995).
43. A. Duparré, E. Welsch, H. G. Walther, H. J. Kühn, and G. Schirmer, J. Phys. 48, 1155 (1987).
44. P. Roche, P. Bousquet, F. Flory, J. Garcin, E. Pelletier, and G. Albrand, J. Opt. Soc. Am. A 1, 1028 (1984).
45. Y. H. Phang, D. E. Savage, R. Kariotis, and M. G. Lagally, J. Appl. Phys. 74, 3181 (1993).