Production of low-electron-temperature electron cyclotron resonance plasma using nitrogen gas in the mirror magnetic field

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 4 A, 2001, Pages 2489-2494

  Itagaki, Naho ^a   Ueda, Yoko ^a   Ishii, Nobuo ^b   Kawai, Yoshinobu ^a  

^a KYUSHU UNIVERSITY   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

ECR plasma; Electron impact cross section; Low electron temperature plasma; Magnetic mirror confinement

Indexed keywords

CARRIER CONCENTRATION; MAGNETIC FIELD EFFECTS; NUMERICAL ANALYSIS; PLASMA COLLISION PROCESSES; PLASMA CONFINEMENT; PLASMA DEVICES;

MAGNETIC-MIRROR CONFINEMENT;

ELECTRON CYCLOTRON RESONANCE;

EID: 0035301733     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.2489     Document Type: Article

References (12)