Ion temperature and fluctuation in a large-diameter electron-cyclotron-resonance plasma

Vacuum

Volumn 66, Issue 3-4, 2002, Pages 329-334

  Koga, Mayuko ^a   Yoshizawa, Takenori ^a   Ueda, Yoko ^a   Kawai, Yoshinobu ^a   Yonesu, Akira ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b UNIVERSITY OF THE RYUKYUS   (Japan)

Author keywords

ECR plasma; Fluctuation; Ion temperature; Optical emission spectroscopy

Indexed keywords

ANISOTROPY; IONS; MICROWAVES; OPTICAL RESOLVING POWER; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ETCHING; PLASMAS;

ION TEMPERATURES; OPTICAL EMISSION SPECTROSCOPY;

ELECTRON CYCLOTRON RESONANCE;

EID: 0037136082     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00139-2     Document Type: Article

References (14)