IrSiN films with superior oxygen-diffusion barrier effect for stacked ferroelectric capacitors

Applied Physics Letters

Volumn 77, Issue 20, 2000, Pages 3200-3202

  Matsushita, Shigeharu ^a   Harada, Mitsuaki ^a   Gueshi, Tatsuro ^a   Matsushita, Yoshifumi ^a  

^a SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038532117     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1326480     Document Type: Article

References (8)

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