Breakthroughs in silicon grism and immersion grating technology at Penn State

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4841, Issue 2, 2002, Pages 1006-1015

  Ge, Jian ^a   McDavitt, Dan ^a   Miller, Shane ^a   Bernecker, John ^a   Chakraborty, Abhijit ^a   Wang, Junfeng ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Anamorphic grating; High resolution; Immersion grating; Infrared; Silicon grism; Spectroscopy

Indexed keywords

ADAPTIVE OPTICS; ETCHING; IMAGE SENSORS; INFRARED RADIATION; INFRARED SPECTROGRAPHS; LITHOGRAPHY; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS; WAVEFRONTS;

SILICON GRISM;

OPTICAL TELESCOPES;

EID: 0038522871     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.461163     Document Type: Conference Paper

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