Chemically amplified main chain scission: Chopping the influence of polymer dimensions on line edge roughness

Journal of Photopolymer Science and Technology

Volumn 16, Issue 1, 2003, Pages 13-18

  Eschbaumer, Christian ^a   Heusinger, Nicole ^a   Kern, Marion ^a   Jutgla, Angela ^a   Hohle, Christoph ^a   Sebald, Michael ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Line Edge Roughness; Main Chain Scission; Polycarbonate

Indexed keywords

POLYMER;

ARTICLE; COMPARATIVE STUDY; MOLECULAR DYNAMICS; NUCLEAR MAGNETIC RESONANCE; PHOTOREACTIVITY; PROTON NUCLEAR MAGNETIC RESONANCE; SCIENCE; SYNTHESIS; TECHNOLOGY;

EID: 0038506843     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.16.13     Document Type: Article

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