Method for designing error-compensating phase-calculation algorithms for phase-shifting interferometry

Applied Optics

Volumn 40, Issue 25, 2001, Pages 4540-4546

  Zhu, Yucong ^a   Gemma, Takashi ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ERROR COMPENSATION; LINEAR EQUATIONS; PHASE SHIFT;

PHASE SHIFTING INTERFEROMETRY;

INTERFEROMETRY;

EID: 0038500700     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.004540     Document Type: Article

References (9)

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