AFM bending testing of nanometric single crystal silicon wire at intermediate temperatures for MEMS

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 135-138

  Isono, Y ^a   Namazu, T ^a   Tanaka, T ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BENDING (DEFORMATION); BENDING STRENGTH; ELASTIC MODULI; NANOSTRUCTURED MATERIALS; PLASTIC DEFORMATION; PLASTICITY; SILICON; SINGLE CRYSTALS; VACUUM; WIRE;

PLASTIC STRAIN;

MICROELECTROMECHANICAL DEVICES;

EID: 0034996019     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)