Micromachine technology development and its applications

Proceedings of the International Symposium on Micromechatronics and Human Science

Volumn , Issue , 1998, Pages 17-22

  Akita, Shigeyuki ^a  

^a DENSO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMOBILE ELECTRONIC EQUIPMENT; AUTOMOTIVE INDUSTRY; MICROMACHINING;

MICROMACHINE TECHNOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 0032308588     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)