The Microassembly Technique for a 3D Single Crystalline Silicon Structure using a Polyimide/Chromium Cantilever

IEEJ Transactions on Sensors and Micromachines

Volumn 119, Issue 4, 1999, Pages 236-241

  Watanabe, Yoshiyuki ^a   Mineta, Takashi ^a   Kobayashi, Seiya ^a   Shibata, Kenya ^b  

^a YAMAGATA RESEARCH INSTITUTE OF TECHNOLOGY   (Japan)

^b Yamagata Kyowa Electronic instruments Co Ltd   (Japan)

Author keywords

microassembly; planarization; polyimide; single crystalline silicon; three dimensional structure

Indexed keywords

EID: 0038466049     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.119.236     Document Type: Article

References (9)

1. T. Mineta, S. Kobayashi, Y. Watanabe, S. Kanauchi, I. Nakagawa, E. Suganuma and M. Esashi, “Three-axis capacitive accelerometer with uniform axial sensitivities”, Proc. TRANSDUCERS'95, 1995, pp. 554-557 (vol. 2).
2. K. Okada, “Tri-axial piezoelectric accelerometer”, Proc. TRANSDUCERS'95, 1995, pp. 566-569.
3. K. Maenaka, T. Sawada and S. Maeda, “Optimum design of vertical Hall cell”, Sensor Symposium, 1992, pp. 75-78.
4. Y. Fukuta, D. Collard, T. Akiyama, E. H. Yang and H. Fujita, “Microactuated self-assembling of 3D polysilicon structure with reshaping technology”, Proc. MEMS'97, 1997, pp. 477-481.
5. L. Y. Lin, J. L. Shen, S. S. Lee, G. D. Su and M. C. Wu, “Microactuated micro-XYZ stages for free-space micro-optical bentch”, Proc. MEMS'97, 1997, pp. 43-48.
6. G. Lin, C. J. Kim, S. Konishi and H. Fujita, “Design, fabrication, and testing of a C-shape actuator”, Proc. TRANSDUCERS'95, 1995, pp. 416-419.
7. T. Ebefors, E. Kalvesten, and G. Stemme, “Three dimensional silicon triple-hot-wire anemometer based on polyimide joints”, Proc. MEMS'98, 1998, pp. 93-98.
8. S. Maeda, Hyomen Gijutsu, vol. 31, No.8, 1993, pp. 27-40 (in Japanese).
9. T. Mineta and E. Suganuma, “Isotropical dry etching of silicon with high rate and planarized surface by using SF6 plasma”, Hyomen Gijutsu, vol. 47, No.4, 1996, pp. 94-95.