Plasma immersion ion implantation of the interior surface of a large cylindrical bore using an auxiliary electrode

Journal of Applied Physics

Volumn 83, Issue 1, 1998, Pages 44-49

  Zeng, X C ^a   Kwok, T K ^a   Liu, A G ^a   Chu, P K ^a   Tang, B Y ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003073397     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366699     Document Type: Article

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