Advanced spin coating film transfer and hot-pressing process for global planarization with dielectric-material-viscosity control

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 4 B, 2002, Pages 2367-2373

  Sato, Norio ^a   Machida, Katsuyuki ^a   Yano, Masaki ^b   Kudou, Kazuhisa ^b   Kyuragi, Hakaru ^a  

^a NTT CORPORATION   (Japan)

^b NTT Advanced Technology Corporation   (Japan)

Author keywords

Dielectric; Gap filling; Global planarization; STP; Viscosity

Indexed keywords

HOT PRESSING; SPIN COATING;

GAP-FILLING; GLOBAL PLANARIZATION; SPIN COATING FILM TRANSFER AND HOT-PRESSING (STP); VACUUM DRYING;

DIELECTRIC MATERIALS;

EID: 0038413077     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.41.2367     Document Type: Article

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