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Volumn 4850, Issue 1, 2002, Pages 527-534

MEMS-based slit generator for NGST-NIRMOS: Modeling and characterization

Author keywords

Dithering; MEMS; Micro mirror array; Micro shutter array; Multi object spectrograph

Indexed keywords

INFRARED SPECTROGRAPHS; MICROELECTROMECHANICAL DEVICES; MIRRORS; MOS DEVICES; OPTICAL SHUTTERS; PHOTOMETRY;

EID: 0038401261     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.461641     Document Type: Conference Paper
Times cited : (5)

References (7)
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  • 2
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    • Burgarella, D.1    Buat, V.2    Dohlen, K.3    Zamkotsian, F.4    Mottier, P.5
  • 3
    • 0038536676 scopus 로고    scopus 로고
    • Aspects of MMA for MOS: Optical modeling and surface characterization, spectrograph optical design
    • Proceedings of the NASA conference on "NGST Science and Technology Exposition", Hyannis, USA
    • F. Zamkotsian, K. Dohlen, D. Burgarella, V. Buat, "Aspects of MMA for MOS: optical modeling and surface characterization, spectrograph optical design", in Proceedings of the NASA conference on "NGST Science and Technology Exposition", ASP Conf. Ser. 207, 218-224, Hyannis, USA (1999)
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  • 4
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    • F. Zamkotsian, K. Dohlen, V. Buat, D. Burgarella, "Multi-Mirror Array Unit-Magnification Multi-Object Spectrograph for NGST", in Proceedings of the SPIE conference on Astronomical Telescopes and Instrumentation 2000, Proc. SPIE 4013, 580-586, Munich, Germany (2000)
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  • 5
    • 0037860258 scopus 로고    scopus 로고
    • Magnetically actuated microshutter arrays
    • Proceedings of the SPIE conference on MOEMS and Miniaturized Systems II
    • D. Mott, S. Aslam, K. Blumenstock, R. Fettig, D. Franz, A. Kutyrev, M. Li, C. Monroy, H. Moseley, D. Schwinger "Magnetically actuated microshutter arrays", in Proceedings of the SPIE conference on MOEMS and Miniaturized Systems II, SPIE 4561, 163-170 (2001)
    • (2001) SPIE , vol.4561 , pp. 163-170
    • Mott, D.1    Aslam, S.2    Blumenstock, K.3    Fettig, R.4    Franz, D.5    Kutyrev, A.6    Li, M.7    Monroy, C.8    Moseley, H.9    Schwinger, D.10
  • 6
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    • Surface characterization of micro-optical components by Foucault's knife-edge method: The case of a micro-mirror array
    • F. Zamkotsian and K. Dohlen, "Surface characterization of micro-optical components by Foucault's knife-edge method: the case of a micro-mirror array", Applied Optics, 38 (31), 6532-6539 (1999)
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  • 7
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.