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Volumn 38, Issue 31, 1999, Pages 6532-6539

Surface characterization of micro-optical components by Foucault’s knife-edge method: The case of a micromirror array

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EID: 0038536680     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.006532     Document Type: Article
Times cited : (17)

References (10)
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    • MOEMS—a new European competence center: Core competencies, additional technologies and industrial
    • M. Motamedi and R. Goering, eds., Proc. SPIE 3276
    • J.-F. Clerc and P. Mottier, “MOEMS—a new European competence center: core competencies, additional technologies and industrial,” in Miniaturized Systems with Micro-Optics and Micromechanics III, M. Motamedi and R. Goering, eds., Proc. SPIE 3276, 176-184 (1998).
    • (1998) Miniaturized Systems with Micro-Optics and Micromechanics III , pp. 176-184
    • Clerc, J.-F.1    Mottier, P.2
  • 2
    • 0010819238 scopus 로고    scopus 로고
    • Optical phase modulation using a refractive len-slet array and microelectromechanical deformable mirror
    • W. D. Cowan, M. K. Lee, B. M. Welsh, V. M. Bright, and M. C. Roggemann, “Optical phase modulation using a refractive len-slet array and microelectromechanical deformable mirror,” Opt. Eng. 37, 3237-3247 (1998).
    • (1998) Opt. Eng. , vol.37 , pp. 3237-3247
    • Cowan, W.D.1    Lee, M.K.2    Welsh, B.M.3    Bright, V.M.4    Roggemann, M.C.5
  • 3
    • 0039262133 scopus 로고
    • Digital light processing and MEMS: Timely convergence for a bright future
    • K. W. Markus, ed., Proc. SPIE 2639
    • L. J. Hornbeck, “Digital light processing and MEMS: timely convergence for a bright future,” in Micromachining and Microfabrication Process Technology, K. W. Markus, ed., Proc. SPIE 2639, 2 (1995).
    • (1995) Micromachining and Microfabrication Process Technology , vol.2
    • Hornbeck, L.J.1
  • 4
    • 84893986041 scopus 로고    scopus 로고
    • 2nd ed. (McGraw Hill, New York,), Chap. 7
    • J. W. Goodman, Introduction to Fourier Optics, 2nd ed. (McGraw Hill, New York, 1996), Chap. 7, pp. 200-202.
    • (1996) Introduction to Fourier Optics , pp. 200-202
    • Goodman, J.W.1
  • 7
    • 0000878334 scopus 로고
    • Memoire sur la construction des telescopes en verre argente
    • L. M. Foucault, “Memoire sur la construction des telescopes en verre argente,” Ann. Obs. Imp. Paris 5, 197-237 (1859).
    • (1859) Ann. Obs. Imp. Paris , vol.5 , pp. 197-237
    • Foucault, L.M.1
  • 8
    • 84975553407 scopus 로고
    • Recherches sur les deformations des grands miroirs employes aux observations astronomiques
    • A. Couder, “Recherches sur les deformations des grands miroirs employes aux observations astronomiques,” Bull. Astron. 7, 201-312 (1931).
    • (1931) Bull. Astron. , vol.7 , pp. 201-312
    • Couder, A.1
  • 9
    • 0042652847 scopus 로고
    • On the quantitative use of the Foucault knife-edge test
    • E. Gaviola, “On the quantitative use of the Foucault knife-edge test,” J. Opt. Soc. Am. 26, 163-169 (1936).
    • (1936) J. Opt. Soc. Am. , vol.26 , pp. 163-169
    • Gaviola, E.1
  • 10
    • 0027652347 scopus 로고
    • Quantitative evaluation of optical surfaces by means of an improved Foucault test approach
    • D. E. Vandenberg, W. D. Humbel, and A. Wertheimer, “Quantitative evaluation of optical surfaces by means of an improved Foucault test approach,” Opt. Eng. 32, 1951-1954 (1993).
    • (1993) Opt. Eng. , vol.32 , pp. 1951-1954
    • Vandenberg, D.E.1    Humbel, W.D.2    Wertheimer, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.