Electron beam recording with a novel differential pumping head realizing more than 50 GB/layer capacity disc

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 2 B, 2003, Pages 759-763

  Furuki, Motohiro ^a   Takeda, Minoru ^a   Yamamoto, Masanobu ^a   Aki, Yuichi ^a   Kawase, Hiroshi ^a   Koizumi, Mitsuru ^b  

^a SONY CORPORATION   (Japan)

^b JEOL LTD   (Japan)

Author keywords

Chemically amplified resist; Differential pumping head; Electron beam; Low acceleration voltage; Mastering; Near field optics; Optical disc

Indexed keywords

ELECTRON GUNS; JITTER; MAGNETIC HEADS; OPTICAL DISK STORAGE; PERFORMANCE; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; VACUUM APPLICATIONS;

CHEMICALLY AMPLIFIED RESIST; DIFFERENTIAL PUMPING HEAD; ELECTRON BEAM RECORDING; NEAR-FIELD OPTICS;

OPTICAL RECORDING;

EID: 0038398759     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.759     Document Type: Article

References (6)

1. M. Takeda, M. Furuki, H. Yamatsu, T. Kashiwagi, Y. Aki, A. Suzuki, K. Kondo, M. Oka and S. Kubota: Jpn. J. Appl. Phys. 38 (1999) 1837.
2. I. Ichimura, S. Masuhara, J. Nakano, Y. Kasami, K. Yasuda and K. Osato: Tech. Dig. Optical Data Storage 2001 (Santa-Fe, 2001) p. 139.
3. Y. Wada, M. Katsumura, Y. Kojima, H. Kitahara and T. Iida: Jpn. J. Appl. Phys. 40 (2001) 1653.
4. S. Imanishi, T. Ishimoto, Y. Aki, T. Kondo, K. Kishima, K. Yamamoto and M. Yamamoto: Jpn. J. Appl. Phys. 39 (2000) 800.
5. K. Saito, T. Ishimoto, T. Kondo, A. Nakaoki and M. Yamamoto: Tech. Dig. Int. Symp. Optical Memory (Taipei, 2001) p. 244.
6. M. Shinoda, K. Saito, T. Kondo, T. Ishimoto and A. Nakaoki: Tech. Dig. Int. Symp. Optical Memory/Optical Data Storage (Hawaii, 2002) p. 284.