Experimental analysis of a DC-RF hybrid plasma flow

Surface and Coatings Technology

Volumn 171, Issue 1-3, 2003, Pages 134-139

  Kawajiri, Kohtaro ^a   Sato, Takehiko ^a   Nishiyama, Hideya ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

DC RF hybrid plasma flow; Flow control; Optimized operating condition

Indexed keywords

GASES; LARGE SCALE SYSTEMS; STABILITY; SWIRLING FLOW; THERMAL EFFECTS;

PLASMA FLOW;

PLASMA FLOW;

FLOW CONTROL; FLOW STABILITY; OPTIMIZATION; PLASMA JET;

EID: 0038382947     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00256-1     Document Type: Article

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