Shaping X-rays by diffractive coded nano-optics

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 87-95

  Di Fabrizio, E ^a   Cabrini, S ^a   Cojoc, D ^a,e   Romanato, F ^a   Businaro, L ^a   Altissimo, M ^a   Kaulich, B ^a   Wilhein, T ^b   Susini, J ^c   De Vittorio, M ^d   Vitale, E ^d   Gigli, G ^d   Cingolani, R ^d  

^a SINCROTRONE TRIESTE   (Italy)

^b RheinAhrCampus Remagen   (Germany)

^c EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^d UNIVERSITY OF SALENTO   (Italy)

^e UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

Coded diffractive optical element; Nano optics; X Ray beamshaping

Indexed keywords

CHEMICAL VAPOR DEPOSITION; LITHOGRAPHY; MONOCHROMATORS; NANOTECHNOLOGY; OPTICAL DEVICES;

CODED DIFFRACTIVE OPTICAL ELEMENTS;

X RAY OPTICS;

EID: 0038359157     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00063-7     Document Type: Conference Paper

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