Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography

Microelectronic Engineering

Volumn 61-62, Issue , 2002, Pages 963-969

  Di Fabrizio, E ^a   Cojoc, D ^b   Businaro, L ^a   Cabrini, S ^a   Romanato, F ^a   Vaccari, L ^a   Altissimo, M ^a  

^a SINCROTRONE TRIESTE   (Italy)

^b UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

Author keywords

2D and 3D optical tweezer arrays; Genetic algorithms; Phase retrieval iterative algorithms

Indexed keywords

ALGORITHMS; DIFFRACTION; ELECTRON BEAM LITHOGRAPHY; ITERATIVE METHODS;

OPTICAL TWEEZER ARRAYS;

OPTICAL DEVICES;

EID: 17344393004     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(02)00426-4     Document Type: Article

References (6)

1. Microgenetic-algorithm optimization methods applied to dielectric gratings