Tunable ferroelectric capacitor with low-loss electrodes fabricated using reverse side exposure

Proceedings - Electronic Components and Technology Conference

Volumn , Issue , 2003, Pages 1534-1540

  Yoon, Yong Kyu ^a   Allen, Mark G ^a   Hunt, Andrew T ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b MicroCoating Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CAPACITANCE; ELECTRODES; EPITAXIAL GROWTH; FERROELECTRIC DEVICES; FERROELECTRIC THIN FILMS; MASKS; PASSIVATION; SUBSTRATES; TUNING;

BARIUM STRONTIUM TITANATE; INTERDIGITATED CAPACITOR; INTERDIGITATED ELECTRODES;

CAPACITORS;

EID: 0038350390     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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