Effects of ultraviolet/ozone treatment on benzocyclobutene films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 3, 2003, Pages 766-771

  Viallet, Benoît ^a   Daran, Emmanuel ^a   Malaquin, Laurent ^a  

^a LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; CHEMICAL RESISTANCE; COMPOSITION EFFECTS; DEGRADATION; DIELECTRIC FILMS; OZONE; PHOTOCHEMICAL REACTIONS; POLYMERIZATION; RADIATION EFFECTS; SILICA; SURFACE PROPERTIES; ULTRAVIOLET RADIATION;

BENZOCYCLOBUTENE FILMS; DIELECTRIC POLYMER RESIN; OZONE TREATMENT; POLYMER STRUCTURE; ULTRAVIOLET TREATMENT;

ORGANIC POLYMERS;

EID: 0038341024     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1570836     Document Type: Article

References (18)

1. C. F. Kane and R. R. Krchnavek, IEEE Photonics Technol. Lett. 7, 535 (1995).
2. T. Bhutta, A. M. Chardon, D. P. Shepherd, E. Daran, C. Serrano, and A. Muñoz-Yagüe, IEEE J. Quantum Electron. 37, 14697 (2001).
3. S. Y. Chou, P. R. Krauss, W. Zhang, L. Guo, and L. Zhuang, J. Vac. Sci. Technol. B 15, 2897 (1997).
4. Y. Chen, A. Lebib, S. Li, A. Pepin, M. Natali, and E. Cambril, Eur. Phys. J.: Appl. Phys. 12, 223 (2000).
5. S. R. Kasi and M. Liehr, Appl. Phys. Lett. 57, 2095 (1990).
6. www.cyclotene.com "Cyclotene™ 4000 series advanced electronic Resins (photo BCB).
7. J. R. Vig, J. Vac. Sci. Technol. A 3, 1027 (1985).
8. C. J. van Oss, Interfacial Forces in Aqueous Media (Marcel Dekker, New York, 1994).
9. S. Luo and C. P. Wong, IEEE Trans. Compon. Packag. Manuf. Technol. 24, 43 (2001).
10. P. G. De Gennes, F. Brochard-Wyart, and D. Quéré, Gouttes, Bulles, Perles et Ondes (Belin, Paris, France, 2002).
11. I. Bertoti, G. Varsanyi, G. Mink, T. Szekely, J. Vaivads, T. Millers, and J. Grabis, Surf. Interface Anal. 12, 527 (1988).
12. C. D. Wagner, W. M. Riggs, L. E. Davis, and J. F. Moulder, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corporation, Eden Prairie, MN, 1974).
13. www.lasurface.com/data_base/w_xps_consult_gen.html
14. M. Ouyang, R. J. Muisener, A. Boulares, and J. T. Koberstein, J. Membr. Sci. 177, 177 (2000).
15. S. A. Vitale, H. Chae, and H. H. Sawin, J. Vac. Sci. Technol. A 18, 2770 (2000).
16. M. Ouyang, C. Yuan, R. J. Muisener, A. Boulares, and J. T. Koberstein, Chem. Mater. 12, 1591 (2000).
17. L. Malaquin, F. Carcenac, C. Vieu, and M. Mauzac, Microelectron. Eng. 61, 379 (2002).
18. T. S. Phely-Bobin, R. J. Muisener, J. T. Koberstein, and F. Papadimitrakopoulos, Synth. Met. 116, 439 (2001).