Mono-axial power spectrograph for a spectral imaging ellipsometer: Design and experimental results

Measurement Science and Technology

Volumn 14, Issue 5, 2003, Pages 558-562

  Chegal, Won ^a   Kim, Soohyun ^a   Kwak, Yoon Keun ^a   Cho, Hyunmo ^b   Lee, Yunwoo ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea Research Institute of Standards and Science   (South Korea)

Author keywords

Mono axial power spectrograph; Spatial transmittance measurements; Spectral imaging ellipsometer

Indexed keywords

DIFFRACTION GRATINGS; ELLIPSOMETRY; HOLOGRAPHY; LIGHT POLARIZATION; LIGHT TRANSMISSION; SPECTROGRAPHS; SPECTRUM ANALYSIS; THIN FILMS;

MONO-AXIAL POWER SPECTROGRAPHS;

IMAGING TECHNIQUES;

ELLIPSOMETER; FILM; IMAGE ANALYSIS; MEASURING INSTRUMENT; THICKNESS;

EID: 0038323045     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/14/5/304     Document Type: Article

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