Diamond-based deep UV sensors for lithography applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 40-47

  Whitfield, Michael D ^b   Lansley, Stuart P ^a   Gaudin, Olivier ^a   McKeag, Robert D ^c   Rizvi, Nadeem ^b   Jackman, Richard B ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b Exitech Limited   (United Kingdom)

^c Centronic Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT COMPOUNDS; DIAMONDS; ENERGY GAP; LASER APPLICATIONS; MANUFACTURE; MICROELECTRONICS; PHOTODETECTORS; PHOTONS; PHOTORESISTS;

DETECTOR SYSTEMS; DIAMOND DEVICES; INTER-DIGITATED ELECTRODES; LASER LITHOGRAPHY; OPTICAL CHARACTERISTICS; PHOTOCONDUCTIVE DEVICES; POLYCRYSTALLINE DIAMONDS; SOLID-STATE PHOTODETECTORS;

FLUORINE COMPOUNDS;

EID: 0038257686     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432534     Document Type: Conference Paper

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