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Volumn 20, Issue 6, 2003, Pages 944-946
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Field emission from amorphous carbon nitride films deposited on silicon tip arrays
a,b
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS CARBON;
AMORPHOUS FILMS;
AMORPHOUS SILICON;
CARBON FILMS;
CARBON NITRIDE;
MAGNETRON SPUTTERING;
SILICON WAFERS;
AMORPHOUS CARBON NITRIDE FILMS;
CARBON NITRIDE FILMS;
CN X FILMS;
ELECTRON FIELD EMISSION;
FIELD-EMISSION PROPERTIES;
PURE NITROGEN ATMOSPHERE;
R.F. MAGNETRON SPUTTERING;
RF-MAGNETRON SPUTTERING;
SILICON TIP ARRAYS;
SILICON TIPS;
FIELD EMISSION;
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EID: 0038237062
PISSN: 0256307X
EISSN: None
Source Type: Journal
DOI: 10.1088/0256-307X/20/6/348 Document Type: Article |
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Times cited : (7)
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References (18)
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