Hermeticity and stiction in MEMS packaging

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2002, Pages 136-139

  Jacobs, S Joshua ^a   Miller, Seth A ^a   Malone, Joshua J ^a   McDonald, William C ^a   Lopes, Vincent C ^a   Magel, Lissa K ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

Adhesives; Jacobian matrices; Magnesium compounds; Microelectromechanical devices; Micromechanical devices; Micromirrors; Mirrors; Moisture; Packaging; Production

Indexed keywords

ADHESIVES; JACOBIAN MATRICES; MAGNESIUM COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MIRRORS; MOISTURE; PRODUCTION; TESTING;

DELETERIOUS EFFECTS; DETECTION SENSITIVITY; DEVICE PERFORMANCE; DIGITAL MICRO-MIRROR DEVICE; LONG TERM PERFORMANCE; MICRO MIRROR; MICROMECHANICAL DEVICE; STATISTICAL INFORMATION;

PACKAGING;

EID: 0038231335     PISSN: 15417026     EISSN: None     Source Type: Journal    
DOI: 10.1109/RELPHY.2002.996625     Document Type: Article

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