Effects of source gases on the growth of carbon nanotubes

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 851-855

  Young Lee, Tae ^a   Han, Jae Hee ^a   Hong Choi, Sun ^a   Yoo, Ji Beom ^a   Park, Chong Yun ^a   Jung, Taewon ^b   Yu, SeGi ^b   Yi, W K ^b   Han, I T ^b   Kim, J M ^b  

^a Sungkyunkwan University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Carbon nanotubes; Chemical vapor deposition; Emission spectroscopy; Source gas

Indexed keywords

ETCHING; GASES; MIXTURES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

DIRECT CURRENTS;

CARBON NANOTUBES;

DIAMOND;

EID: 0038189934     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00290-X     Document Type: Article

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