Deformation control of metal/nitride microbridges

IEICE Transactions on Electronics

Volumn E80-C, Issue 2, 1997, Pages 221-225

  Taguchi, Motohisa ^a   Kawata, Kaoru ^a   Matsuura, Tsukasa ^a   Tsutsumi, Kazuhiko ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Deformation; Flow sensor; Microbridge; Pt SiNx film; Residual stress

Indexed keywords

BUCKLING; DEFORMATION; ETCHING; HEAT TRANSFER COEFFICIENTS; MICROMACHINING; RESISTORS; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON NITRIDE; STRESS ANALYSIS;

FLOW SENSOR; MICROBRIDGES; STRESS GRADIENT;

SENSORS;

EID: 0031070230     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (3)

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