Hot-wire chemical vapor deposition for epitaxial silicon growth on large-grained polycrystalline silicon templates

Thin Solid Films

Volumn 430, Issue 1-2, 2003, Pages 54-57

  Mason, M S ^a   Chen, C M ^a   Atwater, H A ^a  

^a California Institute of Technology   (United States)

Author keywords

Hot wire chemical vapor deposition; Low temperature epitaxial growth; Photovoltaics; Solid phase crystallization

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLIZATION; EPITAXIAL GROWTH; LOW TEMPERATURE EFFECTS; NICKEL; NUCLEATION; PHOTOVOLTAIC EFFECTS; POLYSILICON; TRANSMISSION ELECTRON MICROSCOPY;

SOLID-PHASE CRYSTALLIZATION;

FILM GROWTH;

EID: 0038147228     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00138-X     Document Type: Conference Paper

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