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Journal of Chemical Physics

Volumn 107, Issue 23, 1997, Pages 10278-10287

Nanostructured silicon films obtained by neutral cluster depositions

(9) Melinon P a Keghelian P a Prevel B a Perez, A a Guiraud, G a LeBrusq, J a Lerme J a Pellarin, M a Broyer, M a

a UNIVERSITÉ LYON 1 (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038126776 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.474168 Document Type: Article

Times cited : (77)

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