Noncontact measurement of étalon spacing using a retroreflection technique

Review of Scientific Instruments

Volumn 70, Issue 5, 1999, Pages 2225-2229

  Thomas, Paul J ^a   Mani, R ^a   Khalil, N ^a  

^a YORK UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0013063487     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149741     Document Type: Article

References (11)

1. J. G. Dil, N. C. J. A. van Hinjingen, F. Van Dorst, and R. M Aarts, Appl. Opt. 20, 1374 (1981).
2. S. M Lindsay and M. W Anderson, Rev. Sci. Instrum, 52, 1478 (1981).
3. J. C. Amare, J. M. Alvarez, and F. Moreno, Appl. Opt. 20, 2117 (1981).
4. M. Born and E. Wolf, Principle of Optics, 6th ed. (Pergamon, New York, 1989).
5. G. Lai and T. Yatagai, Appl. Opt. 33, 5935 (1994).
6. O. S. Heavens, Optical Properties of Thin Solid Films (Butterworths, London, 1955).
7. L. Levesque, B. Paton, and S. H. Payne, Appl. Opt. 33, 8036 (1994)
8. J. Chaudhuri and F. Hashmi, J. Appl. Phys. 76, 4454 (1994).
9. R-M-A Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
10. C. Ai and J. C. Wyant, Appl. Opt. 32, 3470 (1993).
11. K. Weir, A. W. Palmer, and K. T. V. Grattan, Int. J. Optoelectron. 9, 449 (1994).