Simultaneous measurement of gap and superposition in a precision aligner for x-ray nanolithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 6, 1996, Pages 3969-3973

  Moon, E E ^a   Everett, P N ^a   Rhee, K ^a,b   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038242761     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588625     Document Type: Article

References (14)

1. E. E. Moon, P. N. Everett, and H. I. Smith, J. Vac. Sci. Technol. B 13, 2648 (1995).
2. Apple Power Macintosh 9500/132.
3. Precision Digital Images, Corp., Redmond, WA; IMAXX board.
4. A. Oppenheim and R. Schafer, Discrete-Time Signal Processing (Prentice-Hall, Englewood Cliffs, NJ, 1989).
5. National Instruments Corp., Austin, TX.
6. Spinnaker multiline laser, Spectra Physics, Mountain View, CA.
7. A. Moel, E. E. Moon, R. Frankel, and H. I. Smith, J. Vac. Sci. Technol. B 11, 2191 (1993).
8. M. J. Rooks, R. C. Tiberio, M. Chapman, T. Hammond, E. Smith, A. Lenef, R. Rubenstein, D. Pritchard, S. Adams, J. Ferrera, J. M. Carter, and H. I. Smith, Jpn. J. Appl. Phys. 34, 6935 (1995).
9. H. I. Smith, S. D. Hector, M. L. Schattenburg, and E. H. Anderson, J. Vac. Sci. Technol. B 9, 2992 (1991).
10. D. M. Puisto, M. S. Lawless, J. M. Rocque, J. P. Levin, K. R. Kimmel, and J. G. Hartley, J. Vac. Sci. Technol. B, these proceedings.
11. J. Ferrera V. V. Wong, S. Rishton, V. Boegli, E. H. Anderson, D. P. Kern, and H. I. Smith, J. Vac. Sci. Technol. B 11, 2342 (1993).
12. Y. C. Ku, M. H. Lim, J. M. Carter, M. K. Mondol, A. Moel, and H. I. Smith, J. Vac. Sci. Technol. B 10, 3169 (1992).
13. R. Englestad, J. Vac. Sci. Technol. B, these proceedings.
14. Shipley Corp, Newton, MA.