Ferromagnetic resonance of dry etched permalloy thin films

IEEE Transactions on Magnetics

Volumn 35, Issue 5 PART 2, 1999, Pages 3397-3399

  Kim, S D ^a,c   Lee, ^a   Kim, ^a   Lim, S H ^a   Kim, H L ^b  

^a Seoul National University   (South Korea)

^b Myong Ji University   (South Korea)

^c Korea Institute of Science and Technology   (South Korea)

Author keywords

Etching damage; Ferromagnetic resonance; Ion beam etching; Permalloy; Reactive ion etching

Indexed keywords

DRY ETCHING; FERROMAGNETIC RESONANCE; FILM PREPARATION; ION BEAMS; MAGNETRON SPUTTERING; STIFFNESS;

ETCHING DAMAGE; ION BEAM ETCHING; PERMALLOYS;

MAGNETIC THIN FILMS;

EID: 0033184135     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.800536     Document Type: Article

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