Uses of High-Sensitivity White-Light Absorption Spectroscopy In Chemical Vapor Deposition and Plasma Processing

Advances in Atomic, Molecular and Optical Physics

Volumn 43, Issue C, 2000, Pages 295-339

  Anderson, L W ^a   Goyette, A N ^a   Lawler, J E ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038087197     PISSN: 1049250X     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1049-250X(08)60128-7     Document Type: Chapter

References (49)

1. Barnes P.D., and Wu R.L.C. Appl. Phys. Lett. 62 (1993) 37
2. Bergeson S.D., Mullman K.L., and Lawler J.E. Astrophys. J. 464 (1995) 1050
3. Booth J.P., Cunge G., Neuilly F., and Sadeghi N. Plasma Sources Sci. Technol. 7 (1998) 432
4. Bou P., Vaudenbulche L., Herbin R., and Hilton F. J. Mater. Res. 7 (1992) 257
5. Celii F.G., and Butler J.E. New Diamond Sci. Technol. 1 (1991) 201
6. Celii F.G., Pehrsson P.E., Wang H.T., and Butler J.E. Appl. Phys. Lett. 52 (1988) 2043
7. Celii F.G., and Butler J.E. Appl. Phys. Lett. 54 (1989) 1031
8. Celii F.G., Pehrsson P.E., Wang H.T., Nelson H.H., and Butler J.E. AIP Conference Proceedings 191 (1989) 747
9. Childs M.A., Menningen K.L., Chevako P., Spellmeyer N.W., Anderson L.W., and Lawler J.E. Phys. Lett. A 171 (1992) 87
10. Childs M.A., Menningen K.L., Toyoda H., Anderson L.W., and Lawler J.E. Europhys. Lett. 25 (1994) 729
11. Childs M.A., Menningen K.L., Toyoda H., Ueda Y., Anderson L.W., and Lawler J.E. Phys. Lett. A 194 (1994) 119
12. Erickson C.J., Childs M.A., Anderson L.W., and Lawler J.E. J. Mater. Res. 10 (1995) 1108
13. Erickson C.J., Jameson W.B., Watts-Cain J., Menningen K.L., Childs M.A., Anderson L.W., and Lawler J.E. Plasma Sources Sci. Technol. 5 (1996) 761
14. Firchow S.J., and Menningen K.L. Bull. Am. Phys. Soc. 42 (1997) 1760
15. Gicquel A., Hassouni K., Breton Y., Chenevier M., and Cubertafon J.C. Diam. Rel. Mater. 5 (1996) 366
16. Glänzer K., Quack M., and Troe J. Proceedings of the 16th Symposium (International) on Combustion (1977), The Combustion Institute, Pittsburgh 949
17. Goodwin D.G., and Gavillet G.G. J. Appl. Phys. 68 (1990) 6393
18. Goodwin D.G., and Gavillet G.G. In: Meissier R., Glass J.T., Butler J.E., and Roy R. (Eds). Proceedings of the 2nd International Conference on New Diamond Science and Technology (1991), Materials Research Society, Pittsburgh 335
19. Goyette A.N., Jameson W.B., Anderson L.W., and Lawler J.E. J. Phys. D 29 (1996) 1197
20. Goyette A.N., Lawler J.E., Anderson L.W., Gruen D.M., McCauley T.G., Zhou D., and Krauss A.R. J. Phys. D 31 (1998) 1975
21. Goyette A.N., Lawler J.E., Anderson L.W., Gruen D.M., McCauley T.G., Zhou D., and Krauss A.R. Plasma Sources Sci. Technol. 7 (1998) 149-153
22. Goyette A.N., Matsuda Y., Anderson L.W., and Lawler J.E. J. Vac. Sci. Technol. A 16 (1998) 337
23. Goyette A.N., Peck J.R., Matsuda Y., Anderson L.W., and Lawler J.E. J. Phys. D 31 (1998) 1556
24. Gruen D.M., Liu S., Krauss A.R., and Pan X. Appl. Phys. Lett. 64 (1994) 1502
25. Gruen D.M., Liu S., Krauss A.R., and Pan X. J. Appl. Phys. 75 (1994) 1758
26. Gruen D.M., Zuiker C., Krauss A.R., and Pan X. J. Vac. Sci. Technol. A 13 (1995) 1628
27. Herzberg G., and Shoosmith J. Can. J. Phys. 24 (1956) 523
28. Hsu W.L. Appl. Phys. Lett. 59 (1991) 1427
29. Killeen K.P. Appl. Phys. Lett. 61 (1992) 1864
30. Klein-Douwel R.J.H., Spaanjaars J.J.L., and Ter Meulen J. J. Appl. Phys. 78 (1995) 2086
31. Loh M.H., and Capelli M.A. Appl. Phys. Lett. 70 (1997) 1052
32. Matsui Y., Yuuki A., Sahara M., and Hirose Y. Jpn. J. Appl. Phys. 28 (1989) 1718
33. Menningen K.L., Childs M.A., Chevako P., Toyoda H., Anderson L.W., and Lawler J.E. Chem. Phys. Lett. 204 (1993) 573
34. Menningen K.L., Childs M.A., Toyoda H., Anderson L.W., and Lawler J.E. J. Mater. Res. 9 (1994) 915
35. Menningen K.L., Childs M.A., Toyoda H., Ueda Y., Anderson L.W., and Lawler J.E. Contrib. Plasma Phys. 35 (1995) 359
36. Menningen K.L., Erickson C.J., Childs M.A., Anderson L.W., and Lawler J.E. J. Mater. Res. 10 (1995) 1108
37. Möller W., Mozyhukhin E., and Wagner H.Gg. Ber. Bunsenges. Phys. Chem. 90 (1986) 854
38. Moore C.E., and Broida H.P. J. Res. Natl. Bur. Stand. Sect. A 63 (1959) 19
39. Muranaka Y., Yamashita H., Sato K., and Miyadera H. J. Appl. Phys. 67 (1990) 6247
40. Sharpe S., Hartnett B., Sethi D.S., and Sethi H.S. J. Photochem. 38 (1987) 1
41. Stalder K.R., and Sharpless R.L. J. Appl Phys. 68 (1990) 6187
42. Stoner B.R., Williams B.E., Wolter S.D., Nishimura K., and Glass J.T. J. Mater. Res. 7 (1992) 257
43. Toyoda H., Kojima H., and Sugui H. App. Phys. Lett. 54 (1988) 2043
44. Toyoda H., Childs M.A., Menningen K.L., Anderson L.W., and Lawler J.E. J. Appl. Phys. 75 (1994) 3142
45. Toyoda H., Goto M., Kitagawa M., and Hirao H. Jpn. J. Appl. Phys. 34 (1995) L448
46. Wamsley R.C., Mitsuhasi K., and Lawler J.E. Rev. Sci. Instrum. 64 (1993) 45
47. Welter R.D., and Menningen K.L. J. Appl. Phys. 82 (1997) 1900
48. Wendt, A. E., Beale, D. F., Hitchon, W. N. G., Keiter, E., Kolobov, V., Mahoney, L., Pierre, A. A., and Stittsworth, J. (1998). U. Kortshagen (Ed.), Electron Kinetics and Applications of Glow Discharges. NATO ASI Series, in press
49. Wolter S.D., Stoner B.R., Glass J.T., Ellis P.J., Buhaenko D.S., Jenkins C.E., and Southworth P. Appl. Phys. Lett. 62 (1993) 1215