Micromachined piezoresistive tactile sensor array fabricated by bulk-etched MUMPs process

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 4, Issue , 2003, Pages

  Lomas, Tanom ^a   Tuantranont, Adisorn ^a   Cheevasuvit, Fusak ^b  

^a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

^b KING MONGKUT'S INSTITUTE OF TECHNOLOGY LADKRABANG   (Thailand)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRIC DEVICES; POLYSILICON; RESISTORS; SYSTEMS ANALYSIS;

PIEZORESISTIVE DEVICES; SENSOR CHIPS;

MICROSENSORS;

EID: 0038080929     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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