Backward deviation and depth recovery of load-displacement curves of amorphous SiC film under repeating nanoindentation

Acta Materialia

Volumn 51, Issue 12, 2003, Pages 3585-3595

  Raju, T Dharma ^a   Kato, Masahiko ^a   Nakasa, Keijiro ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Backward deviation; Delamination; Depth recovery; Repeating nanoindentation; Residual stress; Sputtered SiC thin films

Indexed keywords

AMORPHOUS SILICON; DELAMINATION; INDENTATION; RESIDUAL STRESSES; SPUTTERING;

NANOINDENTATION;

AMORPHOUS FILMS;

EID: 0038071576     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1359-6454(03)00176-9     Document Type: Article

References (25)

1. Fischer-Cripps A.C. Nanoindentation. 2002;Springer, New York.
2. Doerner M.F., Nix W.D. J Mater Res. 1:(4):1986;601.
3. Oliver WC, Hutchings R, Pethica JB. Micro indentation techniques in materials science and engineering. ASTM STP 889; 1986. p. 90.
4. Oliver W.C., Pharr G.M. J Mater Res. 7:(6):1992;1564.
5. Hainsworth S.V., Chandler H.W., Page T.F. J Mater Res. 11:(8):1996;1987.
6. Nix W.D. Mater Sci Eng. 234-236A:1997;37.
7. Pharr G.M. Mater Sci Eng. 253A:1998;151.
8. Gerberich W.W., Venkataraman S.K., Huang H., Harvey S.E., Kohlstedt D.L. Acta Metall Mater. 43:(4):1995;1569.
9. Bahr D.F., Kramer D.E., Gerberich W.W. Acta Mater. 46:(10):1998;3605.
10. Vlassak J.J., Drory M.D., Nix W.D. J Mater Res. 12:(7):1997;1900.
11. Evans A.G., Hutchinson J.W. Int J Solids Structures. 20:(5):1984;455.
12. De Boer M.P., Gerberich W.W. Acta Mater. 44:(8):1996;3169.
13. De Boer M.P., Gerberich W.W. Acta Mater. 44:(8):1996;3177.
14. Kriese M.D., Moody N.R., Gerberich W.W. Acta Mater. 46:(18):1998;6623.
15. Volinsky A.A., Moody N.R., Gerberich W.W. Acta Mater. 50:2002;441.
16. Suresh S., Giannakopoulos A.E. Acta Mater. 46:(16):1998;5755.
17. Matuda N., Baba S., Kinbara A. Thin Solid Films. 81:1981;301.
18. Kinbara A., Baba S. Thin Solid Films. 72:1980;211.
19. Pan A., Greene J.E. Thin Solid Films. 78:1981;25.
20. Marshall D.B., Evans A.G. J Appl Phys. 56:(10):1984;2632.
21. Rossington C., Evans A.G., Marshall D.B., Khuri-Yakub B.T. J Appl Phys. 56:(10):1984;2639.
22. Kriese M.D., Gerberich W.W., Moody N.R. J Mater Res. 14:(7):1999;3007.
23. Raju T.D., Nakasa K., Kato M. Acta Mater. 51:(2):2003;457.
24. Ohring M. Materials science of thin films. 2002;Academic Press, San Diego.
25. Timoshenko S.P. Theory of elastic stability. 1961;McGraw-Hill, New York.