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Volumn 51, Issue 2, 2003, Pages 457-467
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Relation between delamination of thin flims and backward deviation of load-displacement curves under repeating nanoindentation
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Author keywords
Backward deviation; Delamination; Nanoindentation; Residual stresses; Thin films
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
DELAMINATION;
FAILURE (MECHANICAL);
FILM THICKNESS;
NANOINDENTATION;
RESIDUAL STRESSES;
SCANNING ELECTRON MICROSCOPY;
ALN FILMS;
BACKWARD DEVIATION;
COMPRESSIVE RESIDUAL STRESS;
INDENTERS;
LOAD-DISPLACEMENT CURVE;
THIN FILMS;
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EID: 0038438109
PISSN: 13596454
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6454(02)00429-9 Document Type: Article |
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Times cited : (41)
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References (19)
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