Resonant mass biosensor for ultrasensitive detection of bacterial cells

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4982, Issue , 2003, Pages 21-27

  Gupta, Amit ^a   Akin, Demir ^a   Bashir, Rashid ^a,b  

^a PURDUE UNIVERSITY   (United States)

^b PURDUE UNIVERSITY   (United States)

Author keywords

Antibody antigen interactions; Cantilever beam; Chemical mechanical polishing; Mass biosensor; Merged epitaxial lateral overgrowth; Resonant frequency; Silicon on insulator

Indexed keywords

CELLS; CHEMICAL MECHANICAL POLISHING; NATURAL FREQUENCIES; THERMAL NOISE;

RESONANT MASS BIOSENSORS;

BIOSENSORS;

EID: 0038059374     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478147     Document Type: Conference Paper

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