Fatigue of LIGA Nickel

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 175-182

  Boyce, B L ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Fatigue; LIGA; MEMS; Persistent slip bands; Reliability

Indexed keywords

BENDING (DEFORMATION); CRYSTAL MICROSTRUCTURE; FATIGUE TESTING; FINITE ELEMENT METHOD; MICROCRACKING; NICKEL; RELIABILITY; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS; TENSILE STRENGTH; TEXTURES;

MECHANICAL RELIABILITY;

MICROELECTROMECHANICAL DEVICES;

EID: 0038058946     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472732     Document Type: Conference Paper

References (8)

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