Opto-mechanical design of tuneable InP-based Fabry-Pérot filter for gas analysis

Sensors and Actuators, A: Physical

Volumn 94, Issue 3, 2001, Pages 136-141

  Bondavalli, P ^a   Benyattou, T ^b   Garrigues, M ^c   Leclercq, Jean Louis ^c   Jourba, S ^c   Pautet, C ^d   Hugon, X ^d  

^a THALES   (France)

^b INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^c EC Lyon   (France)

^d Near Infrared Division Atmel Grenoble   (France)

Author keywords

Fabry P rot filters; FEA calculation method; Gas sensing; Optical transmission; Opto mechanical simulation

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; GAS FUEL ANALYSIS; HYDROCARBONS; LIGHT TRANSMISSION; SEMICONDUCTING INDIUM PHOSPHIDE;

FABRY-PEROT FILTERS; OPTO-MECHANICAL SIMULATION;

OPTICAL FILTERS;

EID: 0035923312     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00701-4     Document Type: Article

References (14)

1. Highly selective and widely tuneable 1.55 μm InP/air-gap micromachined Fabry-Pérot filter for optical communications
2. Carbon Dioxide Sensor Based on Micromachined Fabry-Pérot interferometer
3. 4 gas using low-loss optical fiber link
4. All optical remote monitoring of propane gas using a 5 km long, low loss optical fiber link and an InGaP light-emitting diode in the 1.68 μm region
5. 2 molecules by differential asorption using optical fiber link
6. 4 at 1.33 μm using an InGaAs light-emitting diode
7. Tuneable micro-cavity based on InP/air Bragg minors
8. Recherche sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifies: Applications aux couches minces
9. Influence of the involuntary under-ectching on the mechanical properties of tuneable Fabry-Pérot filters for optical communications
10. Microelectromechanical tuneable filters with stable half symmetric cavity