Comparison of optical and electrical properties of BON and Ti-BON thin films prepared by PAMOCVD method

Surface and Coatings Technology

Volumn 171, Issue 1-3, 2003, Pages 101-105

  Lim, D C ^a   Chen, G C ^a   Boo, J H ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

BON and Ti BON thin films; Low frequency RF PAMOCVD; Optical and electrical properties

Indexed keywords

ELECTRIC PROPERTIES; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTICAL PROPERTIES; TITANIUM COMPOUNDS;

PRECURSORS;

THIN FILMS;

ELECTRICAL PROPERTY; FILM;

EID: 0038044606     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00248-2     Document Type: Article

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