A slip model for gas lubrication based on an effective viscosity concept

Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology

Volumn 217, Issue 3, 2003, Pages 187-196

  Sun, Y H ^a   Chan, W K ^a   Liu, N Y ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Effective viscosity; Knudsen number; Mean free path; Microelectromechanical systems (MEMS); Slip velocity

Indexed keywords

APPROXIMATION THEORY; CHANNEL FLOW; GAS LUBRICATED BEARINGS; GASES; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; VALVES (MECHANICAL); VISCOSITY;

GAS LUBRICATION;

LUBRICATION;

GAS; LUBRICATION; MATHEMATICAL ANALYSIS; MODELING; SLIP; VISCOSITY;

EID: 0038036383     PISSN: 13506501     EISSN: None     Source Type: Journal    
DOI: 10.1243/135065003765714836     Document Type: Article

References (18)

1. Burgdorfer, The influence of the molecular mean free path on the performance of hydrodynamic gas lubricated bearings. Trans. ASME, J. Basic Engng, 1959, 81, 94-100.
2. Hsia, Y. T. and Domoto, G. A. An experimental investigation of molecular rarefaction effects in gas lubricated bearings at ultra-low clearances. Trans. ASME, J. Tribology, 1983, 105, 120-130.
3. Mitsuya, Y. Modifed Reynolds equation for ultra-thin film gas lubrication using 1.5-order slip-flow model and considering surface accommodation coefficient. Trans. ASME, J. Tribology, 1993, 115, 289-294.
4. Beskok, A. Simulations and models for gas flows in microgeometries. PhD dissertation, Princeton University, Princeton, New Jersey, 1996.
5. Gad-el-Hak, M. The fluid mechanics of microdevices-the Freeman scholar lecture. Trans. ASME, J. Fluids Engng, 1999, 121(5), 5-33.
6. Tison, S. A. Experimental data and theoretical modeling of gas flows through metal capillary leaks. Vacuum, 1993, 44, 1171-1175.
7. Harley, J. C., Huang, Y. F., Bau, H. H. and Zemel, J. N. Gas flow in microchannels. J. Fluid Mechanics, 1995, 284, 257-274.
8. Pfahler, J., Harley, J., Bau, H. and Zemel, J. N. Gas and liquid flow in small channels. In Proceedings of the Symposium on Micromechanical Sensors, Actuators, and Systems, 1991, DSC-Vol. 32, pp. 49-60 (American Society of Mechanical Engineers, New York).
9. Liu, J., Tai, Y. C., Pong, K. and Ho, C. M. MEMS for pressure distributions studies of gaseous flows in microchannels. In Proceedings of the IEEE Conference on Micro Electro Mechanical Systems, 1995, pp. 209-215 (IEEE, New York).
10. Pong, K. C., Ho, C. M., Liu, J. and Tai, Y. C. Non-linear pressure distribution in uniform microchannels. In Application of Microfabrication to Fluid Mechanics 1994 (Eds P. R. Bandyopadhyay, K. S. Breuer and C. J. Belchinger), 1994, FED-Vol. 197, pp. 47-52 (American Society of Mechanical Engineers, New York).
11. Arkilic, E. B., Schmidt, M. A. and Breuer, K. S. Gases slip flow in long microchannels. J. Microelectromech. Systems, 1997, 6, 167-178.
12. Bird, G. A. Molecular Gas Dynamics and the Direct Simulation of Gas Flows, 1994 (Clarendon, Oxford).
13. Alexander, F. J., Garcia, A. L. and Alder, B. J. Direct simulation for thin-film bearings. Phys. Fluids, 1994, 6(12), 3854-3860.
14. Huang, W. D., Bogy, D. B. and Garcia, A. L. Three-dimensional direct simulation Monte Carlo method for slider air bearings. Physics Fluids, 1997, 9(6), 1764-1769.
15. Veijola, T. and Turowski, M. Compact damping models for laterally moving microstructures with gas-rarefaction effects. Report, Circuit Theory Laboratory, Espoo, Helsinki University of Technology, August 2000.
16. Cercignani, C. and Pagani, C. D. Variational approach to boundary-value problems in kinetic theory. Physics Fluids, 1966, 9(6), 1167-1173.
17. Fukui, S. and Kaneko, R. Analysis of ultra-thin gas film lubrication based on linearized Boltzmann equation: first report-derivation of a generalized lubrication equation including thermal creep flow. Trans. ASME, J. Tribology, 1988, 110, 253-262.
18. Ohwada, T., Sone, Y. and Aoki, K. Numerical analysis of the Poiseuille and thermal transpiration flows between two parallel plates on the basis of the Boltzmann equation for hard-sphere molecules. Physics Fluids A, 1989, 1(12), 2042-2049.