Self-aligned electrodes for suspended carbon nanotube structures

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 615-622

  Robinson, L A W ^a   Lee, S B ^a   Teo, K B K ^b   Chhowalla, M ^b   Amaratunga, G A J ^b   Milne, W I ^b   Williams, D A ^c   Hasko, D G ^a   Ahmed, H ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c HITACHI CAMBRIDGE LABORATORY   (United Kingdom)

Author keywords

Oxidised silicon substrate; Self aligned electrodes; Suspended multi walled carbon nanotube

Indexed keywords

DEPOSITION; ELECTRODES; ELECTRON MOBILITY; FABRICATION; METALS;

ISLAND FORMATION;

CARBON NANOTUBES;

EID: 0038020126     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00122-9     Document Type: Conference Paper

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