Low temperature deposition of c-axis oriented Sr-ferrite thin films prepared by facing targets sputtering with mixture gas of Ar and Kr

Journal of Applied Physics

Volumn 93, Issue 10 3, 2003, Pages 8170-8172

  Nakagawa, Shigeki ^a   Mizuno, Keisuke ^a   Naoe, Masahiko ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; FERRITES; KRYPTON; LOW TEMPERATURE EFFECTS; SPUTTERING; STRONTIUM;

LOW TEMPERATURE DEPOSITION;

THIN FILMS;

EID: 0037979269     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1555846     Document Type: Conference Paper

References (8)

1. N. Honda, T. Kiya, and K. Ouchi, J. Magn. Soc. Jpn. 21, 505 (1997).
2. M. Matsuoka, Y. Hoshi, M. Naoe, and S. Yamanaka, IEEE Trans. Magn. MAG-18, 1119 (1982).
3. M. Matsuoka, Y. Hoshi, M. Naoe, and S. Yamanaka, IEEE Trans. Magn. MAG-20, 800 (1984).
4. A. Morisako, M. Matsumoto, and M. Naoe, IEEE Trans. Magn. MAG-22, 1146 (1986).
5. K. Noma, N. Matsushita, S. Nakagawa, and M. Naoe, J. Appl. Phys. 81, 4377 (1997).
6. X. Sui, B. K. Cheong, D. E. Laughlin, and M. H. Kryder, J. Magn. Soc. Jpn. 18, 319 (1994).
7. J. Feng, N. Funabashi, N. Matsushita, S, Nakagawa, and M. Naoe, IEICE Trans. Electron. E83-C, 1489 (2000).
8. N. Matsushita, J. Feng, N. Funabashi, S. Nakagawa, and M. Naoe, J. Appl. Phys. 89, 6837 (2001).