Analysis of parameters of multilayer carbon interference structures in the soft x-ray range

Applied Physics Letters

Volumn 69, Issue 3, 1996, Pages 305-307

  Kondrashov, P E ^a   Smirnov, I S ^a   Novoselova, E G ^a   Baranov, A M ^b  

^a NATIONAL RESEARCH UNIVERSITY HIGHER SCHOOL OF ECONOMICS   (Russian Federation)

^b Res Institute of Vacuum Technique   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CALCULATIONS; CARBON; DENSITY (SPECIFIC GRAVITY); DEPOSITION; LIGHT REFLECTION; MULTILAYERS; OPTICAL RESOLVING POWER; PLASMA APPLICATIONS; X RAY SPECTROSCOPY;

HYDROGENATED CARBON FILMS; MULTILAYER CARBON INTERFERENCE STRUCTURES; PLASMA DEPOSITION; REFLECTIVITY; X RAY INTERFERENCE MIRRORS;

MIRRORS;

EID: 0030192925     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118041     Document Type: Article

References (6)

1. E. Spiller, Soft X-Ray Optics (SPIE Optical Engineering, Washington, DC, 1994).
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3. P. E. Kondrashov, I. S. Smirnov, H. G. Novoselova, A. M. Baranov, and V. V. Sleptsov, Proc. SPIE 2517, 126 (1995).
4. N. N. Salashenko, Yu. Ya. Platonov, and S. Yu. Zuev, Poverhnost: Fiz. Chim. Mehanika N 10, 5 (1995).
5. L. G. Parrat, Phys. Rev. 95, 359 (1954).
6. H. Tsai and B. Body, J. Vac. Sci. Technol. A 5, 3287 (1987).