Adhesive forces acting on micro objects in manipulation under SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3202, Issue , 1998, Pages 197-208

  Miyazaki, Hideki ^a   Tomizawa, Yasushi ^a   Koyano, Koichi ^b   Sato, Tomomasa ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b HITACHI LTD   (Japan)

Author keywords

Adhesive force; Electrostatic force; Force measurement; Micro object handling; SEM

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROSTATIC DEVICES; ELECTROSTATIC FORCE; ELECTROSTATICS; INTERFEROMETERS; MICROSYSTEMS; NANOCANTILEVERS; PROGRAMMING THEORY; SCANNING ELECTRON MICROSCOPY; SPECTROSCOPIC ANALYSIS; SURFACE TENSION; VAN DER WAALS FORCES;

ADHESIVE FORCE; CANTILEVER TIPS; DIRECT MEASUREMENTS; IN-SITU; LASER INTERFEROMETERS; MEASUREMENT SYSTEMS; MICRO FORCES; MICRO OBJECT HANDLING; SCANNING ELECTRON MICROSCOPES; SEM; SPRING CONSTANTS; SURFACE TENSION FORCES;

FORCE MEASUREMENT;

EID: 58849088456     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.298038     Document Type: Conference Paper

References (8)

1. K. Koyano and T. Sato, "Micro Object Handling System with Concentrated Visual Fields and New Handling Skills", Proc. of IEEE Intern. Conf. on Robotics and Automation, pp.2541-2548, 1996.
2. Y. Hatamura, M. Nakao, and T. Sato, "Construction of Nano Manufacturing World", Microsystem Technologies, vol.1, pp.155-162, 1995.
3. H. Miyazaki and T. Sato, "Fabrication of 3D Quantum Optical Devices by Pick-and-Place Forming", Proc. of IEEE Intern. Workshop on Micro Electro Mechanical Systems, pp.318-324, 1996.
4. R. S. Fearing, "Survey of Sticking Effects for Micro Parts Handling", Proc. of IEEE/RSJ Intern. Conf. on Intelligent Robots and Systems, pp.212-217, 1995.
5. H. Miyazaki and T. Sato, "Mechanical Assembly of Three-Dimensional Microstructures under a Scanning Electron Microscope", Proc. of Intern. Conf. on Micromechatronics for Information and Precision Equipment, pp.335-340, 1997.
6. F. Arai and T. Fukuda, "Micro Endeffector with Micro Pyramids and Integrated Piezoresistive Force Sensor", Proc. of IEEE/RSJ Intern. Conf. on Intelligent Robots and Systems, pp.842-849, 1996.
7. M. Nakao, K.Ishii, T.Sato, and Y. Hatamura, "Prototypes of Micro Nontweezing Handling Tools with Releasing Mechanism", Trans. of Japan Society of Mechanical Engineers (C), vol.61, pp.1021-1026, 1995(in Japanese).
8. H. Miyazaki, T. Kasaya, K. Koyano, and T. Sato, "Adhesive Force Acting on Micro Objects" Trans. of Japan Society of Mechanical Engineers (C) (in Japanese, in progress).