2×2 Multiwavelength micromachined AlGaAs/GaAs vertical cavity filter array with wavelength control layer

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 7 A, 2000, Pages

  Amano, Takeru ^a   Koyama, Fumio ^a   Nishiyama, Nobuhiko ^a   Iga, Kenichi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC NETWORK SYNTHESIS; ETCHING; MICROMACHINING; MIRRORS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICE MANUFACTURE; THICKNESS CONTROL;

ADD/DROP FILTERS; ALUMINUM GALLIUM ARSENIDE; DISTRIBUTED BRAGG REFLECTORS (DBR); VERTICAL CAVITY FILTERS;

ELECTRIC FILTERS;

EID: 0034227292     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.l673     Document Type: Article

References (7)