Micromachined AlGaAs/GaAs vertical cavity filter with adjustable temperature dependence and wavelength trimming ability

Electronics Letters

Volumn 36, Issue 1, 2000, Pages 74-76

  Amano, T ^a   Koyama, F ^a   Furukawa, N ^a   Nishiyama, N ^a   Matsutani, A ^a   Iga, K ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; MIRRORS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; THERMAL EFFECTS; THERMAL EXPANSION;

DISTRIBUTED BRAGG REFLECTORS (DBR); VERTICAL CAVITY FILTERS; WAVELENGTH TRIMMING;

OPTICAL FILTERS;

EID: 0033640206     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20000123     Document Type: Article

References (5)

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2. WU, M.S., VAIL, E.G., LI, G.S., YUEN, W., and CHANG-HASNAIN, C.J.: 'GaAs micromachined widely tunable Fabry-Perot filter', Electron. Lett., 1995, 31, pp. 1671-1672
3. SUDOH, T.K., NAKANO, Y., and TADA, K.: 'Wavelength trimming by photoabsorption-included disordering for multiple-wavelength distributed feedback laser arrays', IEEE Photonics Technol. Lett., 1997, 9, (7), pp. 887-888
4. KOYAMA, F., and IGA, K.: 'Wavelength stabilization and trimming technologies for vertical-cavity surface emitting laser arrays'. Paper QTh-14, OSA Tech. Dig. Series, Quantum Optoelectronics, 1997, Vol. 9, pp. 90-92
5. MATSUTANI, A., OHTUKI, H., KOYAMA. F., and IGA, K.: 'Vertical and smooth etching of InP by Cl2/Xe inductively coupled plasma', Jpn. J. Appl. Phys., 1999, 38, pp. 4260-4261