X-ray scattering from uniform and patterned indium tin oxide thin films

Journal of Physics D: Applied Physics

Volumn 36, Issue 10 A, 2003, Pages

  Clarke, J ^a   Pape, I ^b   Normile, P ^a   Tanner, B K ^a  

^a DURHAM UNIVERSITY   (United Kingdom)

^b Hemel Hempstead International   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; ETCHING; INDIUM COMPOUNDS; INTERFEROMETRY; ROUGHNESS MEASUREMENT; SURFACE ROUGHNESS; THICKNESS MEASUREMENT; THIN FILMS;

DISTORTED WAVE BORN APPROXIMATION; GRAZING INCIDENCE X RAY SCATTERING; INDIUM TIN OXIDE; LASER INTERFEROMETRIC PATTERNING; SOFTWARE PACKAGE MERCURY;

X RAY SCATTERING;

EID: 0037945605     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/36/10A/343     Document Type: Article

References (13)

1. Hoshi Y and Kiyomura T 2002 Thin Solid Films 411 36
2. Tak Y H, Kim K B, Park H Y, Lee K H and Lee J R 2002 Thin Solid Films 411 12
3. Matterson B J, Salt M G, Barnes W L and Samuel I D W 1999 Synth. Met. 101 250
4. Samuel I D W 1997 Synth. Met. 84 497
5. Loxley N, Monteiro A, Cooke M L, Bowen D K and Tanner B K 1992 Mater. Res. Soc. Symp. Proc. 240 219
6. Pape I, Hase T P A, Tanner B K and Wormington M 1998 Physica B 253 278
7. Wormington M, Bowen D K and Tanner B K 1992 Mater. Res. Soc. Symp. Proc. 238 119
8. Sinha S K, Sirota E B, Garoff S and Stanley H B 1998 Phys. Rev. B 38 2973
9. Wormington M, Pannacione C, Matney K M and Bowen D K 1999 Phil. Trans. R. Soc. A 357 2827
10. Lupton J M, Matterson B J, Samuel I D W, Jory M J and Barnes W L 2000 Appl. Phys. Lett. 77 3340
11. Wormington M, Pape I, Hase T P A, Tanner B K and Bowen D K 1996 Phil. Mag. Lett. 74 211
12. Clarke J 1999 PhD Thesis University of Durham
13. Tanner B K, Hase T P A, Clarke J, Pape I, Li-Bassi A and Fulthorpe B D 2001 Appl. Surf. Sci. 182 202