Formation of buried oxide layers in titanium by high-fluence oxygen ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 1072-1076

  Hammerl, C ^a   Bohne, Y ^b   Assmann, W ^c   Helming, K ^d   Rauschenbach, B ^b  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^c UNIVERSITY OF MUNICH   (Germany)

^d BRUKER AXS GMBH   (Germany)

Author keywords

Ion implantation; Phase formation; Titanium oxide; X ray diffraction

Indexed keywords

MICROSTRUCTURE; MORPHOLOGY; TITANIUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

PHASE FORMATION;

ION IMPLANTATION;

EID: 0037904992     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00913-3     Document Type: Conference Paper

References (13)

1. Alov N.V., Leonov M.P. Phys. Chem Mater. Treat. 20:1986;94.
2. Diebold U., Pan J.-M., Madey T.E. Surf. Sci. 331-333:1995;845.
3. Escobar-Alarcón L., Haro-Poniatowski E., Camacho-López M.A., Fernández-Guasti M., Jímenez-Jarquín J., Sánchez-Pineda A. Appl. Surf. Sci. 137:1999;38.
4. Okabe Y., Fujihana T., Iwaki M., Ohira S., Crist B.V. Surf. Coat. Technol. 66:1994;384.
5. Okabe Y., Iwaki M., Takahashi K., Ohira S., Crist B.V. Nucl. Instr. and Meth. B. 39:1989;619.
6. Höhl F., Berndt H., Mayr P., Stock H.-R. Surf. Coat. Technol. 74-75:1995;765.
7. Parker T.E., Kelly R. J. Phys. Chem. Solids. 36:1975;377.
8. Okabe Y., Iwaki M., Takahashi K. Nucl. Instr. and Meth. B. 61:1991;44.
9. W. Moeller, TRIDYN, Version 4.0, Dynamic Composition TRIM Program, 1989.
10. Powder Diffraction File, Joint Commitee on Powder Diffraction Standarde, JCPDF, Park Lane, 1989.
11. Hammerl C., Rauschenbach B. Nucl. Instr. and Meth. B. 178:2001;220.
12. Pohl T., Hammerl C., Rauschenbach B., Rüde U. Nucl. Instr. and Meth. B. 178:2001;135.
13. Ostwald W. Z. Phys. Chem. 34:1900;495. [blank_line]