Synthesis of buried metal oxide films by high fluence oxygen ion implantation into metals

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 178, Issue 1-4, 2001, Pages 220-223

  Hammerl, C ^a   Rauschenbach, B ^a,b  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

Buried layer; Molybdenum; Oxygen ion implantation; Phase formation; Titanium

Indexed keywords

ION IMPLANTATION; MOLYBDENUM; OXYGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THERMAL EFFECTS; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

BURIED METAL OXIDE FILMS; OXYGEN ION IMPLANTATION; PHASE FORMATION;

METALLIC FILMS;

EID: 0035335013     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00464-X     Document Type: Conference Paper

References (6)